Lithographic characterisation of a selection of polymeric resists for microlithographic applications
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University of Kent
1997
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Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327 |
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ndltd-bl.uk-oai-ethos.bl.uk-2443272015-03-19T06:16:28ZLithographic characterisation of a selection of polymeric resists for microlithographic applicationsMurphy, Julian James1997770ReprographicsUniversity of Kenthttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327Electronic Thesis or Dissertation |
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NDLTD |
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NDLTD |
topic |
770 Reprographics |
spellingShingle |
770 Reprographics Murphy, Julian James Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
author |
Murphy, Julian James |
author_facet |
Murphy, Julian James |
author_sort |
Murphy, Julian James |
title |
Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
title_short |
Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
title_full |
Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
title_fullStr |
Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
title_full_unstemmed |
Lithographic characterisation of a selection of polymeric resists for microlithographic applications |
title_sort |
lithographic characterisation of a selection of polymeric resists for microlithographic applications |
publisher |
University of Kent |
publishDate |
1997 |
url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327 |
work_keys_str_mv |
AT murphyjulianjames lithographiccharacterisationofaselectionofpolymericresistsformicrolithographicapplications |
_version_ |
1716747353526894592 |