Lithographic characterisation of a selection of polymeric resists for microlithographic applications

Lithographic characterisation of a selection of polymeric resists for microlithographic applications

Bibliographic Details
Main Author: Murphy, Julian James
Published: University of Kent 1997
Subjects:
770
Reprographics
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327
id ndltd-bl.uk-oai-ethos.bl.uk-244327
record_format oai_dc
spelling ndltd-bl.uk-oai-ethos.bl.uk-2443272015-03-19T06:16:28ZLithographic characterisation of a selection of polymeric resists for microlithographic applicationsMurphy, Julian James1997770ReprographicsUniversity of Kenthttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 770
Reprographics
spellingShingle 770
Reprographics
Murphy, Julian James
Lithographic characterisation of a selection of polymeric resists for microlithographic applications
author Murphy, Julian James
author_facet Murphy, Julian James
author_sort Murphy, Julian James
title Lithographic characterisation of a selection of polymeric resists for microlithographic applications
title_short Lithographic characterisation of a selection of polymeric resists for microlithographic applications
title_full Lithographic characterisation of a selection of polymeric resists for microlithographic applications
title_fullStr Lithographic characterisation of a selection of polymeric resists for microlithographic applications
title_full_unstemmed Lithographic characterisation of a selection of polymeric resists for microlithographic applications
title_sort lithographic characterisation of a selection of polymeric resists for microlithographic applications
publisher University of Kent
publishDate 1997
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327
work_keys_str_mv AT murphyjulianjames lithographiccharacterisationofaselectionofpolymericresistsformicrolithographicapplications
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