The implantation of donor ions into gallium arsenide for field effect transistors

The purpose of the work described in this dissertation was to investigate the use of donor ion implantation into GaAs for the production of doped layers suitable for the manufacture of Schottky gated field effect transistors or MESFETs. The project had four main aims: (i) The establishment of a reli...

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Bibliographic Details
Main Author: Surridge, R. K.
Published: University of Surrey 1983
Subjects:
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.346869