Anodization of silicon in an oxygen plasma

Bibliographic Details
Main Author: Kiermasz, A.
Published: University of Liverpool 1983
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372665
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spelling ndltd-bl.uk-oai-ethos.bl.uk-3726652016-08-04T04:10:43ZAnodization of silicon in an oxygen plasmaKiermasz, A.1983530.41Solid-state physicsUniversity of Liverpoolhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372665Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 530.41
Solid-state physics
spellingShingle 530.41
Solid-state physics
Kiermasz, A.
Anodization of silicon in an oxygen plasma
author Kiermasz, A.
author_facet Kiermasz, A.
author_sort Kiermasz, A.
title Anodization of silicon in an oxygen plasma
title_short Anodization of silicon in an oxygen plasma
title_full Anodization of silicon in an oxygen plasma
title_fullStr Anodization of silicon in an oxygen plasma
title_full_unstemmed Anodization of silicon in an oxygen plasma
title_sort anodization of silicon in an oxygen plasma
publisher University of Liverpool
publishDate 1983
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372665
work_keys_str_mv AT kiermasza anodizationofsiliconinanoxygenplasma
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