Anodization of silicon in an oxygen plasma
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University of Liverpool
1983
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ndltd-bl.uk-oai-ethos.bl.uk-3726652016-08-04T04:10:43ZAnodization of silicon in an oxygen plasmaKiermasz, A.1983530.41Solid-state physicsUniversity of Liverpoolhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372665Electronic Thesis or Dissertation |
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NDLTD |
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NDLTD |
topic |
530.41 Solid-state physics |
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530.41 Solid-state physics Kiermasz, A. Anodization of silicon in an oxygen plasma |
author |
Kiermasz, A. |
author_facet |
Kiermasz, A. |
author_sort |
Kiermasz, A. |
title |
Anodization of silicon in an oxygen plasma |
title_short |
Anodization of silicon in an oxygen plasma |
title_full |
Anodization of silicon in an oxygen plasma |
title_fullStr |
Anodization of silicon in an oxygen plasma |
title_full_unstemmed |
Anodization of silicon in an oxygen plasma |
title_sort |
anodization of silicon in an oxygen plasma |
publisher |
University of Liverpool |
publishDate |
1983 |
url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372665 |
work_keys_str_mv |
AT kiermasza anodizationofsiliconinanoxygenplasma |
_version_ |
1718372654858108928 |