A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
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University of Reading
1988
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ndltd-bl.uk-oai-ethos.bl.uk-3808532015-03-19T07:10:57ZA study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon filmsAwang Mat, A. F.1988530.41Solid-state physicsUniversity of Readinghttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853Electronic Thesis or Dissertation |
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sources |
NDLTD |
topic |
530.41 Solid-state physics |
spellingShingle |
530.41 Solid-state physics Awang Mat, A. F. A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
author |
Awang Mat, A. F. |
author_facet |
Awang Mat, A. F. |
author_sort |
Awang Mat, A. F. |
title |
A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
title_short |
A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
title_full |
A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
title_fullStr |
A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
title_full_unstemmed |
A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films |
title_sort |
study of electrical, optical and structural properties of rf sputtered and ion beam sputtered silicon films |
publisher |
University of Reading |
publishDate |
1988 |
url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853 |
work_keys_str_mv |
AT awangmataf astudyofelectricalopticalandstructuralpropertiesofrfsputteredandionbeamsputteredsiliconfilms AT awangmataf studyofelectricalopticalandstructuralpropertiesofrfsputteredandionbeamsputteredsiliconfilms |
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1716755122022776832 |