A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films

Bibliographic Details
Main Author:	Awang Mat, A. F.
Published:	University of Reading 1988
Subjects:	530.41 Solid-state physics
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853

id	ndltd-bl.uk-oai-ethos.bl.uk-380853
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-3808532015-03-19T07:10:57ZA study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon filmsAwang Mat, A. F.1988530.41Solid-state physicsUniversity of Readinghttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	530.41 Solid-state physics
spellingShingle	530.41 Solid-state physics Awang Mat, A. F. A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
author	Awang Mat, A. F.
author_facet	Awang Mat, A. F.
author_sort	Awang Mat, A. F.
title	A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
title_short	A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
title_full	A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
title_fullStr	A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
title_full_unstemmed	A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
title_sort	study of electrical, optical and structural properties of rf sputtered and ion beam sputtered silicon films
publisher	University of Reading
publishDate	1988
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853
work_keys_str_mv	AT awangmataf astudyofelectricalopticalandstructuralpropertiesofrfsputteredandionbeamsputteredsiliconfilms AT awangmataf studyofelectricalopticalandstructuralpropertiesofrfsputteredandionbeamsputteredsiliconfilms
_version_	1716755122022776832

A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films

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