Chemical relaxation of silane in a radio frequency discharge

Chemical relaxation of silane in a radio frequency discharge

Bibliographic Details
Main Author:	Johnson, N. P.
Published:	University of Strathclyde 1986
Subjects:	530.44 Plasma chemistry of silane
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.381498

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