Diamond-like carbon films deposited by RF plasma decomposition of methane

Diamond-like carbon films deposited by RF plasma decomposition of methane

Bibliographic Details
Main Author:	Pan, Xiaodan
Published:	University of Strathclyde 1992
Subjects:	530.41 Solid-state physics
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.388566

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