Novel precursors for chemical vapour deposition of the metals copper, nickel and cobalt

Novel precursors for chemical vapour deposition of the metals copper, nickel and cobalt

Bibliographic Details
Main Author:	Rosenberg, Chico L.
Published:	Imperial College London 2003
Subjects:	671.735
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.397331

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