Improved precursors for the chemical vapour deposition of metal oxides

Improved precursors for the chemical vapour deposition of metal oxides

Bibliographic Details
Main Author:	Tobin, Neil Lawrence
Published:	University of Liverpool 2004
Subjects:	547.05510453
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.417972

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