Vapour-phase deposition of functional nanolayers
Vapour-phase deposition techniques have many advantages including being solventless and providing fine control (down to the nanometre level) of coating thickness. This thesis is about the use of both plasmachemical deposition and oxidative vapour-phase deposition to form functional coatings. Chapter...
Main Author: | |
---|---|
Published: |
Durham University
2013
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.567883 |