Micro-electro-mechanical systems and nanotechnology

Micro-Electro-Mechanical-System (MEMS) and Nanotechnology have both received significant attention in recent years due to their potential for manufacturing highly miniaturised devices which consume less raw materials and energy in their production, and function with greater efficiency, speed, and re...

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Bibliographic Details
Main Author: Fu, Y.
Published: University of Cambridge 2004
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.599251

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