Single-source precursors for the aerosol assisted chemical vapour deposition of gallium arsenide
This thesis describes the synthesis of single-source gallium arsenide (GaAs) precursors and the deposition of films on glass substrates using aerosol assisted chemical vapour deposition (AACVD). A range of precursors were synthesised including silyl arsine containing compounds such as [Me2GaAs(SiMe2...
Main Author: | Sathasivam, S. |
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Published: |
University College London (University of London)
2013
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Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.626202 |
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