Micro and nano-manufacturing process chains : maturity assessment and bulk metallic glass enabled manufacturing routes
The utilisation of process chains is considered as a way forward to achieve cost effective and high throughput production of miniaturised devices. However there are no methodologies to analyse systematically process chains and thus to inform their development and design new ones for microfabrication...
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University of Birmingham
2015
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.667798 |