Vapour phase HF and XeF2 etching methods with improved selectivity for MEMS manufacturing

Vapour phase HF and XeF2 etching methods with improved selectivity for MEMS manufacturing

Bibliographic Details
Main Author:	Drysdale, Daniel
Other Authors:	Wang, Changhai
Published:	Heriot-Watt University 2015
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.726846

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