The numerical modelling of focussed ion beam systems
The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized mach...
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Loughborough University
1987
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.734106 |
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ndltd-bl.uk-oai-ethos.bl.uk-7341062018-04-04T03:25:09ZThe numerical modelling of focussed ion beam systemsAmos, Robert J.1987The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized machines in order to model the behaviour of beams of charged particles through electrostatic systems.Loughborough Universityhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.734106https://dspace.lboro.ac.uk/2134/28312Electronic Thesis or Dissertation |
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NDLTD |
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NDLTD |
| description |
The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized machines in order to model the behaviour of beams of charged particles through electrostatic systems. |
| author |
Amos, Robert J. |
| spellingShingle |
Amos, Robert J. The numerical modelling of focussed ion beam systems |
| author_facet |
Amos, Robert J. |
| author_sort |
Amos, Robert J. |
| title |
The numerical modelling of focussed ion beam systems |
| title_short |
The numerical modelling of focussed ion beam systems |
| title_full |
The numerical modelling of focussed ion beam systems |
| title_fullStr |
The numerical modelling of focussed ion beam systems |
| title_full_unstemmed |
The numerical modelling of focussed ion beam systems |
| title_sort |
numerical modelling of focussed ion beam systems |
| publisher |
Loughborough University |
| publishDate |
1987 |
| url |
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.734106 |
| work_keys_str_mv |
AT amosrobertj thenumericalmodellingoffocussedionbeamsystems AT amosrobertj numericalmodellingoffocussedionbeamsystems |
| _version_ |
1718619092224573440 |