A study on the composition and deposition mechanism of boron-silicon alloy films using ICP-AES, EDX and FT-IR techniques

Bibliographic Details
Main Author: Leu, Chun-lun Alan
Format: Others
Language:English
Published: HKBU Institutional Repository 1991
Subjects:
Online Access:https://repository.hkbu.edu.hk/etd_ra/4
https://repository.hkbu.edu.hk/cgi/viewcontent.cgi?article=1003&context=etd_ra
Description
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