The development of a predictive autofocus algorithm using a general image formation model

• Main Author: Nicolls, Frederick C
• Other Authors: De Jager, Gerhard
• Format: Dissertation
• Language: English
• Published: University of Cape Town 2016
• Subjects: Electrical Engineering
• Online Access: http://hdl.handle.net/11427/21760

Bibliography: pages 97-99. === This were outlines the development of a general imaging model for use in autofocus, astigmatism correction, and resolution analysis. The model is based on the modulation transfer function of the imaging system in the presence of aberrations, in particular defocus. The extension of the model to include astigmatism is also included. The signals used are related to the ratios of the Fourier transforms of images captured under different operating conditions. Methods are developed for working with these signals in a consistent manner. The model described is then applied to the problem of autofocus. A general autofocus algorithm is presented and results given which reflect the predictive properties of this model. The imaging system used for the generation of results was a scanning electron microscope, although the conclusions should be valid across a far wider range of instruments. It is however the specific requirements of the SEM that make the generalisation presented here particularly useful.