Structural, electrical and electronic properties of diamond like carbon (DLC) and carbon-based materials
this work, we have used the diamond-like carbon (DLC) also known as hydrogenated amorphous carbon (a-C:H), silicon doped DLC (a-C:H:Si) thin films deposited by the plasma enhanced chemical vapour deposition (PECVD) process on silicon substrate and studied their structural, electrical and electronic...
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| Format: | Others |
| Language: | en |
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2014
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| Online Access: | http://hdl.handle.net10539/14032 |