Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monol...

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Bibliographic Details
Main Authors: Barniol, N. (Author), Ledesma, E. (Author), Uranga, A. (Author), Yanez, J. (Author), Zamora, I. (Author)
Format: Article
Language:English
Published: Springer Nature 2022
Subjects:
Acoustic resonators
Acoustic wave velocity
CMOS integrated circuits
Complementary metal oxide semiconductors
Electrodes
Fluid densities
Fluid hydrodynamic
Fluid measurement
Hydrodynamic properties
Metals
Micro-machined ultrasonic transducer
Monolithics
MOS devices
Nitrogen compounds
Oxide semiconductors
Piezoelectric
Piezoelectricity
Single cell systems
Single cells
Ultrasonic transducers
Viscosity
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