Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monol...
Main Authors: | Barniol, N. (Author), Ledesma, E. (Author), Uranga, A. (Author), Yanez, J. (Author), Zamora, I. (Author) |
---|---|
Format: | Article |
Language: | English |
Published: |
Springer Nature
2022
|
Subjects: | |
Online Access: | View Fulltext in Publisher |
Similar Items
-
Squared PMUT with Enhanced Pressure Sensitivities
by: Eyglis Ledesma, et al.
Published: (2018-11-01) -
Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
by: Ivan Zamora, et al.
Published: (2020-01-01) -
A fluidics-based double flexural membrane piezoelectric micromachined ultrasonic transducer (Pmut) for wide-bandwidth underwater acoustic applications
by: Ahmad, K.A, et al.
Published: (2021) -
A Novel Ultrasonic Cleaning Tank Developed by Harmonic Response Analysis and Computational Fluid Dynamics
by: Worapol Tangsopa, et al.
Published: (2020-03-01) -
A comparison of models for a piezoelectric 31-mode segmented cylindrical transducer
by: Joseph, Nicholas John
Published: (2014)