Investigation on the structural characterization of pulsed p-type porous silicon
P-type Porous silicon (PS) was sucessfully formed by using an electrochemical pulse etching (PC) and conventional direct current (DC) etching techniques. The PS was etched in the Hydrofluoric (HF) based solution at a current density of J = 10 mA/cm2 for 30 minutes from a crystalline silicon wafer wi...
| Main Authors: | , , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2017
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| Online Access: | View Fulltext in Publisher View in Scopus |
| LEADER | 02048nas a2200301Ia 4500 | ||
|---|---|---|---|
| 001 | 10.1063-1.4998356 | ||
| 008 | 220120c20179999CNT?? ? 0 0und d | ||
| 020 | |a 0094243X (ISSN); 9780735415553 (ISBN) | ||
| 245 | 1 | 0 | |a Investigation on the structural characterization of pulsed p-type porous silicon |
| 260 | 0 | |b American Institute of Physics Inc. |c 2017 | |
| 520 | 3 | |a P-type Porous silicon (PS) was sucessfully formed by using an electrochemical pulse etching (PC) and conventional direct current (DC) etching techniques. The PS was etched in the Hydrofluoric (HF) based solution at a current density of J = 10 mA/cm2 for 30 minutes from a crystalline silicon wafer with (100) orientation. For the PC process, the current was supplied through a pulse generator with 14 ms cycle time (T) with 10 ms on time (Ton) and pause time (Toff) of 4 ms respectively. FESEM, EDX, AFM, and XRD have been used to characterize the morphological properties of the PS. FESEM images showed that pulse PS (PPC) sample produces more uniform circular structures with estimated average pore sizes of 42.14 nm compared to DC porous (PDC) sample with estimated average size of 16.37nm respectively. The EDX spectrum for both samples showed higher Si content with minimal presence of oxide. © 2017 Author(s). | |
| 700 | 1 | 0 | |a Abdullah M.H.R.O. |e author |
| 700 | 1 | 0 | |a Ali M.N.M. |e author |
| 700 | 1 | 0 | |a Bermakai M. |e author |
| 700 | 1 | 0 | |a Hussain Z. |e author |
| 700 | 1 | 0 | |a Ibrahim A. |e author |
| 700 | 1 | 0 | |a Jamalludin D. |e author |
| 700 | 1 | 0 | |a Jumidali M.M. |e author |
| 700 | 1 | 0 | |a Mahmood A. |e author |
| 700 | 1 | 0 | |a Mahmood, A. |e author |
| 700 | 1 | 0 | |a Mukhtar N.M. |e author |
| 700 | 1 | 0 | |a Rahim, A.F.A. |e author |
| 700 | 1 | 0 | |a Wahab, N.H.A. |e author |
| 700 | 1 | 0 | |a Yusof A.M. |e author |
| 700 | 1 | 0 | |a Yusof, Y. |e author |
| 700 | 1 | 0 | |a Yusoff M.Z.M. |e author |
| 856 | |z View Fulltext in Publisher |u https://doi.org/10.1063/1.4998356 | ||
| 856 | |z View in Scopus |u https://www.scopus.com/inward/record.uri?eid=2-s2.0-85031320411&doi=10.1063%2f1.4998356&partnerID=40&md5=84916dc11adb8a734eeb247f61c7ee22 | ||