Three-Dimensional TiO2Film Deposited by ALD on Porous Metallic Scaffold for 3D Li-Ion Micro-Batteries: A Road towards Ultra-High Capacity Electrode

• Main Authors: Boyaval, C. (Author), Brousse, T. (Author), Hallot, M. (Author), Huvé, M. (Author), Karroubi, L.B (Author), Lethien, C. (Author), Patnaik, S.G (Author), Pech, D. (Author), Roussel, P. (Author), Troadec, D. (Author)
• Format: Article
• Language: English
• Published: IOP Publishing Ltd 2022
• Subjects: 3-D electrodes; 3D Li-ion micro-batteries; 3d li-ion micro-battery; Atomic layer deposition; Electrodes; high areal capacity; High areal capacity; High-Capacity Electrodes; Ions; Li-ion micro-batteries; Porous metallics; Power; Scaffolds; Thin film lithium ion batteries; thin films; Thin films; Thin-films; TiO 2 films; TiO2; Titanium dioxide; Ultra-high
• Online Access: View Fulltext in Publisher
• ISBN: 00134651 (ISSN)
• DOI: 10.1149/1945-7111/ac6328

To power the next generation of miniaturized electronic devices, the energy storage capability of Li-ion micro-batteries has to be significantly improved and the fabrication of high performance 3D electrodes is mandatory. Here we show how to carefully match the design of efficient 3D scaffold based on metallic porous template with the deposition parameters of titanium dioxide films made from thermal Atomic Layer Deposition method for designing efficient 3D electrodes for Li-ion micro-batteries. A 3D electrode made from Pt porous scaffold coated with 150 nm-Thick anatase TiO2 film reaches a high surface capacity value up to 1600 ?Ah.cm?2 at C/12 with a good cycling stability during 100 cycles. © 2022 The Electrochemical Society ("ECS"). Published on behalf of ECS by IOP Publishing Limited.