Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon

Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces...

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Bibliographic Details
Main Authors: Moktadir, Z. (Author), Vijaya Prakash, G. (Author), Trupke, M. (Author), Koukharenko, E. (Author), Kraft, M. (Author), Baumberg, J.J (Author), Eriksson, S. (Author), Hinds, E.A (Author)
Format: Article
Language:English
Published: 2005.
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Online Access:Get fulltext
LEADER 01052 am a22002053u 4500
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042 |a dc 
100 1 0 |a Moktadir, Z.  |e author 
700 1 0 |a Vijaya Prakash, G.  |e author 
700 1 0 |a Trupke, M.  |e author 
700 1 0 |a Koukharenko, E.  |e author 
700 1 0 |a Kraft, M.  |e author 
700 1 0 |a Baumberg, J.J.  |e author 
700 1 0 |a Eriksson, S.  |e author 
700 1 0 |a Hinds, E.A.  |e author 
245 0 0 |a Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon 
260 |c 2005. 
856 |z Get fulltext  |u https://eprints.soton.ac.uk/14619/1/APL05_pyramid_micromirror.pdf 
520 |a Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems. 
655 7 |a Article 

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