Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Abstract A higher-order electromechanical sigma-delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
2006.
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Subjects: | |
Online Access: | Get fulltext |