Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Abstract A higher-order electromechanical sigma-delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2006.
|
| Subjects: | |
| Online Access: | Get fulltext |