Electron-beam writing of photonic crystal patterns using a large beam-spot diameter

Bibliographic Details
Main Authors: Kim, S (Author), Chong, H (Author), De La Rue, R M (Author), Marsh, J H (Author), Bryce, A C (Author)
Format: Article
Language:English
Published: 2003.
Subjects:
Online Access:Get fulltext
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100 1 0 |a Kim, S  |e author 
700 1 0 |a Chong, H  |e author 
700 1 0 |a De La Rue, R M  |e author 
700 1 0 |a Marsh, J H  |e author 
700 1 0 |a Bryce, A C  |e author 
245 0 0 |a Electron-beam writing of photonic crystal patterns using a large beam-spot diameter 
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