Electron-beam writing of photonic crystal patterns using a large beam-spot diameter
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
2003.
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Subjects: | |
Online Access: | Get fulltext |
LEADER | 00543 am a22001573u 4500 | ||
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001 | 264938 | ||
042 | |a dc | ||
100 | 1 | 0 | |a Kim, S |e author |
700 | 1 | 0 | |a Chong, H |e author |
700 | 1 | 0 | |a De La Rue, R M |e author |
700 | 1 | 0 | |a Marsh, J H |e author |
700 | 1 | 0 | |a Bryce, A C |e author |
245 | 0 | 0 | |a Electron-beam writing of photonic crystal patterns using a large beam-spot diameter |
260 | |c 2003. | ||
856 | |z Get fulltext |u https://eprints.soton.ac.uk/264938/1/ELECTRON-BEAM_WRITING_OF_PHOTONIC_CRYSTAL_PATTERNS_USING_A_LARGE_BEAM-SPOT_DIAMETER_2003.pdf | ||
655 | 7 | |a Article |