Electron-beam writing of photonic crystal patterns using a large beam-spot diameter

Bibliographic Details
Main Authors:	Kim, S (Author), Chong, H (Author), De La Rue, R M (Author), Marsh, J H (Author), Bryce, A C (Author)
Format:	Article
Language:	English
Published:	2003.
Subjects:	Article
Online Access:	Get fulltext

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