A high resolution silicon-on-glass Z Axis Gyroscope Operating at Atmospheric Pressure
This paper describes a high-resolution silicon-on-glass <i>z</i> axis gyroscope operating at atmospheric pressure. The mechanical structure is designed in such a way that it exhibits low cross coupling between drive and sense mode of less than 0.5% simulated using finite-element method a...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2010-06.
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| Subjects: | |
| Online Access: | Get fulltext |