Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film
A novel combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) technique was used to synthesise numerous vanadium oxide and vanadium oxynitride phases on a single film. This is the first example of cAPCVD having been used to synthesise a gradating mixed anion system. The film was cha...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009-01-28.
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| Subjects: | |
| Online Access: | Get fulltext |