Helium ion microscopy and energy selective scanning electron microscopy - two advanced microscopy techniques with complementary applications
Both scanning electron microscopes (SEM) and helium ion microscopes (HeIM) are based on the same principle of a charged particle beam scanning across the surface and generating secondary electrons (SEs) to form images. However, there is a pronounced difference in the energy spectra of the emitted se...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014-08.
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| Subjects: | |
| Online Access: | Get fulltext |