Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluor...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
1998-11.
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| Subjects: | |
| Online Access: | Get fulltext |
| LEADER | 01185 am a22001693u 4500 | ||
|---|---|---|---|
| 001 | 77914 | ||
| 042 | |a dc | ||
| 100 | 1 | 0 | |a Barry, I.E. |e author |
| 700 | 1 | 0 | |a Ross, G.W. |e author |
| 700 | 1 | 0 | |a Smith, P.G.R. |e author |
| 700 | 1 | 0 | |a Eason, R.W. |e author |
| 700 | 1 | 0 | |a Cook, G. |e author |
| 245 | 0 | 0 | |a Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains |
| 260 | |c 1998-11. | ||
| 856 | |z Get fulltext |u https://eprints.soton.ac.uk/77914/1/1575.pdf | ||
| 520 | |a Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluoric and nitric acids, at a range of temperatures between room temperature and the boiling point. The structures produced show very smooth, well defined, deep features, which have a range of applications in optical ridge waveguides, alignment structures, V-grooves, and micro-tips. Details are given of the fabrication procedures, and examples of structures are shown. | ||
| 655 | 7 | |a Article | |