|
|
|
|
| LEADER |
01563 am a22001573u 4500 |
| 001 |
78903 |
| 042 |
|
|
|a dc
|
| 100 |
1 |
0 |
|a Sloyan, Katherine A.
|e author
|
| 700 |
1 |
0 |
|a May-Smith, Timothy C.
|e author
|
| 700 |
1 |
0 |
|a Eason, Robert W.
|e author
|
| 700 |
1 |
0 |
|a Lunney, James G.
|e author
|
| 245 |
0 |
0 |
|a The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition
|
| 260 |
|
|
|c 2009-08-30.
|
| 856 |
|
|
|z Get fulltext
|u https://eprints.soton.ac.uk/78903/1/4418.pdf
|
| 520 |
|
|
|a We report the effects of relative time delay of plasma plumes on thin garnet crystal films fabricated by dual-beam, combinatorial pulsed laser deposition. Relative plume delay was found to affect both the lattice constant and elemental composition of mixed Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> (GGG) and Gd<sub>3</sub>Sc<sub>2</sub>Ga<sub>5</sub>O<sub>12</sub> (GSGG) films. Further analysis of the plasmas was undertaken using a Langmuir probe, which revealed that for relative plume delays shorter than ~200 µs, the second plume travels through a partial vacuum created by the first plume, leading to higher energy ion bombardment of the growing film. The resulting in-plane stresses are consistent with the transition to a higher value of lattice constant normal to the film plane that was observed around this delay value. At delays shorter than ~10 µs, plume propagation was found to overlap, leading to scattering of lighter ions from the plume and a change in stoichiometry of the resultant films.
|
| 655 |
7 |
|
|a Article
|
