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The effect of quantity reduction of photosensitive polyimide on the uniformity and film quality of the spin-coated passivation layer in integrated circuits
by
Chang, Yung-Hsin
,
張永欣
Published 2014
“
.... This is because the excessive PI solution is
spun
out
of the wafer at the beginning of the spin process...
”
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Chang, Yung-Hsin
Pan, Fu-Ming
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張永欣
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