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Chen, Li
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Kelber, Jeffry A.
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NDLTD
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Author:
Chen, Li
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Kelber, Jeffry A.
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NDLTD
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Adhesion/Diffusion Barrier Layers for Copper Integration: Carbon-Silicon Polymer Films and Tantalum Substrates
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Chen, Li
Published 1999
“
... by
electron
beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors...
”
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Chen, Li
Kelber, Jeffry A.
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