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Chih-Hsiung Shen
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Search Results - SEMICONDUCTOR MANUFACTURING TECHNOLOGY
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A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS
Technology
by
Chi-Feng Chen
,
Chih-Hsiung Shen
,
Yun-Ying Yeh
Published 2021-12-01
“
... in Taiwan
semiconductor
manufacturing
company (TSMC). The measurement results of those prototypes...
”
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Chi-Feng Chen
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Chih-Hsiung Shen
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