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Constant, Aurore
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Montpellier 2
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NDLTD
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SiC oxidation processing technology for MOSFETs fabrication
by
Constant, Aurore
Published 2011
“
.... De plus, les mécanismes physiques associés à la
formation
de l'oxyde et des propriétés de l'interface...
”
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Constant, Aurore
Montpellier 2
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