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David Wei Zhang
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Dielectric Enhancement of Atomic Layer-Deposited Al2O3/ZrO2/Al2O3 MIM Capacitors by Microwave Annealing
by
Bao Zhu
,
Xiaohan Wu
,
Wen-Jun Liu
,
Shi-Jin Ding
,
David Wei Zhang
,
Zhongyong Fan
Published 2019-02-01
“
..., and analog/
mixed
-
signal
integrated
circuits
, a high capacitance density is imperative with the downscaling...
”
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Bao Zhu
1
David Wei Zhang
Shi-Jin Ding
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Wen-Jun Liu
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Xiaohan Wu
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Zhongyong Fan
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