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Duane S. Boning
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Lang, Christopher Ilic
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Dielectric spin coating characterization, modeling, and planarization using fill patterns for advanced packaging technologies
by
Lang, Christopher Ilic
Published 2018
“
..., and propose dummy fill and cheesing patterns which
control
the variations of the DSC
process
. We first design...
”
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Duane S. Boning
Lang, Christopher Ilic
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