“.... The width of the cascade micro channels is optimized utilizing the COMSOL software. The photolithography...”
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“... wafer using photolithography and sputtered the gold layer onto the hemispheres. Then, The wafer...”
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“... was formed on a 6-inch reclaimed silicon wafer using photolithography. Then, a thin gold layer was sputtered...”
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“... is proposed in this study. Sequential fabrication processes, including photolithography, nano electroforming...”
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“... photolithography and evaporation. Experimental results illustrated that a micro electrode with a blunt-ended...”
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