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2by Tsai, Hsin-Yu Sidney“...-94). === In this thesis, the concept of absorbance-modulation optical lithography (AMOL) is described...”
Published 2009
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4by Chao, David, Ph. D. Massachusetts Institute of Technology“... Science, 2005. === Includes bibliographical references (p. 85-87). === As lithography quickly approaches...”
Published 2006
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5by Menon, Rajesh, 1976-“... has primarily been driven by the capability of lithography to pattern smaller and smaller features...”
Published 2005
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6by Djomehri, Ihsan Jahed, 1976-“... new paradigm in nanolithography, zone plate array lithography (ZPAL), has yielded a clearer...”
Published 2005
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7by Ferrera, Juan (Ferrera Uranga)“... Science, 2000. === Includes bibliographical references (p. 259-268). === Electron-beam lithography...”
Published 2005
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9by Walsh, Michael E. (Michael Edward), 1975-“... fulfill this need. The technique of interference lithography is examined in the context of patterning ~100...”
Published 2005
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11by Zhang, Feng, 1973-“...-beam lithography (EBL) to create sub-10-nm features with arbitrary geometry makes it a critical tool...”
Published 2008
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14by Hastings, Jeffrey Todd, 1975-“... lithography (SEBL) provides sub-10-nm resolution and arbitrary-pattern generation; however, SEBL's pattern...”
Published 2006
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19by Cheong, Lin Lee“... lithography (SPLEBL) is a method that tracks and corrects the position of an electron-beam in real-time...”
Published 2010
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20by Patel, Amil Ashok, 1979-“... in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high...”
Published 2005
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