“... of Holographic inference and Photolithography. In this experiment, it cooperate the technique MEMS fabrication...”
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“... FBG holographic interference lithography (Holographic Interferometry Lithography) and photolithography...”
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“... printing with the photolithography and holographic technique. First we made a ridge waveguides component...”
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“... fiber by polishing the surface on the fiber. After, utilizes the photolithography and holographic...”
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“... waveguide asymmetric structure in LIGA technology in the photolithography process, the micro-contact molding...”
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“... the photolithography process to fabricate waveguide channel, combined with soft lithography process technology in micro...”
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“... waveguide asymmetric structure, in MEMS process technology as the foundation, the use of photolithography...”
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