2.5D indirect boundary element method (IBEM) 1 Ambient vibrations 1 Baseline methods 1 Bionic microelectromechanical system silicon diaphragm 1 Bionics 1 Classification (of information) 1 Coaxiality 1 Deep learning 1 Diabetic nephropathy 1 Diaphragms 1 Directional microphones 1 Dual channel 1 Electromechanical devices 1 Failure analysis 1 Fault detection 1 Fault sample 1 Faults diagnosis 1 Few-shot learning 1 Full widths at half maximums 1 High sensitivity 1 Interferometrics 1 Interferometry 1 MEMS 1 Mach-Zehnder 1 Mach–Zehnder interferometer 1 Maintenance cost 1 Metalearning 1 Microfilaments 1 Microphones 1 Model-agnostic meta-learning 1