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1by Chien-Ping Wang, Burn Jeng Lin, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin, Ya-Chin KingSubjects: “...FinFET CMOS technologies...”
Published 2021-05-01
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3by Yu-Cheng Liao, Hsin-Wei Pan, Min-Che Hsieh, Tzong-Sheng Chang, Yu-Der Chih, Ming-Jinn Tsai, Chrong Jung Lin, Ya-Chin King“... technology with Cu damascene via. The device is stacked between a top Cu via and a bottom Cu metal with a...”
Published 2014-01-01
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