Showing 1 - 1 results of 1 for search 'GAS TRANSMISSION AND DISTRIBUTION', query time: 1.03s Refine Results
  1. 1
    Control of Plasma Etching of Semiconductor Surfaces
    by Zhu, Hongbin
    Published 2005
    “... distribution. Gas addition caused the transition between ohmic and stochastic heating. Ar-CH4-H2 and Ar-N2-H2...”
    Get full text
Search Tools: Get RSS Feed — Email this Search