Showing 1 - 4 results of 4 for search 'DESIGN REPRODUCTION', query time: 0.53s Refine Results
  1. 1
    Evaluation and Modeling of Novel Groove Pad Designs on Inter-layer Dielectric and Copper Chemical Mechanical Planarization
    by Rosales-Yeomans, Daniel
    Published 2007
    “... effects.Other studies in this dissertation were related to the evaluation and modeling of novel groove designs...”
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  2. 2
    Pad-Wafer and Brush-Wafer Contact Characterization in Planarization and Post-Planarization Processes
    by SUN, TING
    Published 2009
    “... of brush roller design on scrubbing process and to analyze behaviors of eccentric brushes.In order to study...”
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  3. 3
    Characterization and Modeling of Mainstream and Alternative Conditioning and Polishing Technologies in Inter-Layer Dielectric and Copper Chemical Mechanical Planarization
    by Lee, Hyosang
    Published 2008
    “... was performed to explore the effects of conditioner design factors on removal rate and COF in copper CMP...”
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  4. 4
    Tribological, Kinetic and Thermal Characteristics of Copper Chemical Mechanical Planarization
    by Li, Zhonglin
    Published 2005
    “... with the slurry flow rate. Also slurry film thickness strongly depends on diamond disc design....”
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