Showing 1 - 2 results of 2 for search 'MECHANICS AND MATERIALS LAB', query time: 0.80s Refine Results
  1. 1
    IN-SITU ELECTRO-CHEMICAL RESIDUE SENSOR AND PROCESS MODEL APPLICATION IN RINSING AND DRYING OF NANO-STRUCTURES
    by Dhane, Kedar
    Published 2010
    “... the electro-chemical residue sensor (ECRS) was incorporated in a lab scale single-wafer spinning and single...”
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  2. 2
    Metrology and Characterization of Impurity Transport During Cleaning of Micro and Nano Structures
    by Yan, Jun
    Published 2006
    “... inside the micro and nano structures. Using this technology, the mechanisms and bottlenecks of cleaning...”
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