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Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
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Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement
by
Pügner, Tino
Published 2016
“
... based on a micro-opto-
electro
-mechanical device or a micro-opto-electromechanical system, respectively...
”
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Doctoral Thesis
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Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
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