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1“... for manipulations of bio-particles have been proposed, but most of proposed methods have some limitations...”
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2“... of bio-particles by MEMS technology are growing because of the fabrication development...”
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3“...-particles by MEMS devices are increasingly growing because of technology and fabrication development...”
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4“.... Therefore, to separate, sort out, purify and detect target biological particles/molecules like DNA, proteins...”
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