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METAL PRODUCTION TECHNOLOGY THEORY
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DOAJ
Author:
Aleksander A. Bizyukov
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METAL PRODUCTION TECHNOLOGY THEORY
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Macroparticle Reflection from a Biased Substrtate in Plasma Ion Implantation Systems
by
Elena V. Romashchenko
,
Aleksander A. Bizyukov
,
Igor O. Girka
Published 2020-02-01
“
...Generation of
metal
plasma in vacuum arc discharge is always accompanied by a
production
...
”
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Aleksander A. Bizyukov
Elena V. Romashchenko
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Igor O. Girka
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