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SEMICONDUCTOR MANUFACTURING TECHNOLOGY
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Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity
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Search Results - SEMICONDUCTOR MANUFACTURING TECHNOLOGY
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SEMICONDUCTOR MANUFACTURING TECHNOLOGY
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1
Defect reduction in Cu chemical-mechanical polishing
by
Eusner, Thor
,
Saka, Nannaji
,
Chun, Jung-Hoon
Published 2013
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2
Hall mobility of cuprous oxide thin films deposited by reactive direct-current magnetron sputtering
by
Lee, Yun Seog
,
Winkler, Mark Thomas
,
Siah, Sin Cheng
,
Brandt, Riley E
,
Buonassisi, Anthony
Published 2013
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3
Insulator-to-Metal Transition in Selenium-Hyperdoped Silicon: Observation and Origin
by
Ertekin, Elif
,
Winkler, Mark Thomas
,
Recht, Daniel
,
Said, Aurore J.
,
Aziz, Michael J.
,
Grossman, Jeffrey C.
,
Buonassisi, Anthony
Published 2012
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3
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MIT IR
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3
Author
Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity
Buonassisi, Anthony
2
Buonassisi, Tonio
2
Massachusetts Institute of Technology. Department of Mechanical Engineering
2
Winkler, Mark Thomas
2
Aziz, Michael J.
1
Brandt, Riley E
1
Brandt, Riley E.
1
Chun, Jung-Hoon
1
Ertekin, Elif
1
Eusner, Thor
1
Grossman, Jeffrey C.
1
Lee, Yun Seog
1
Massachusetts Institute of Technology. Department of Materials Science and Engineering
1
Massachusetts Institute of Technology. School of Engineering
1
Recht, Daniel
1
Said, Aurore J.
1
Saka, Nannaji
1
Siah, Sin Cheng
1
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