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Aqua Regia
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Aqua regia
Electrodes
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Lead zirconate titanate
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Lead zirconate-titanate
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PLD-PZT
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Pulsed laser deposited lead zirconate titanate
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Thick photoresist
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Wet etching
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1Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist maskSubjects: “...High temperature applications...”
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