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Gray scale
2
Laser beams
2
Photoresists
Contrast curve
1
Curve fitting
1
Curve shape
1
Cutting edges
1
Direct write lithography
1
Direct-write lithography
1
Exposure correction
1
Feature sizes
1
Figure of merit
1
Functional nanostructures
1
Gaussian beams
1
Grayscale
1
Interference lithography
1
Iterative methods
1
Laser-based
1
Metasurface
1
Modulation
1
Nano pattern
1
Nanostructures
1
Pixels
1
Plasmonics
1
Positive resist
1
Positive resists
1
Proximity exposure correction
1
Shape optimization
1
Shape-optimization
1
Spatial modulations
1
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2by Collé, D., Ekindorf, G., Erjawetz, J., Heyl, P., Reddy, A., Ritter, D., Schift, H.Subjects: “...Direct write lithography...”
Published 2022
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